J. Technology and Education, Vol.13, No.2, pp.39-45, 2006
研究論文
住毋家岩夫*1、森本健太1、比留間文彦†2
1鞄d硝エンジニアリング （〒347-0111 埼玉県北埼玉郡騎西町鴻茎3202-1）
2ウェールズ大学 （〒162-0825 東京都新宿区神楽坂1-2）
†adm@u-wales.jp
New Integrated Production Technology of Metal Shield Parts in Equipment for Semiconductor Device Manufacturing
Iwao SUMOGE*1, Kenta MORIMOTO1, Fumihiko HIRUMA2
1Densho Engineering Co., Ltd (3202-1, Koguki, Kisai, Kita-Saitama, Saitama 347-0111)
2University of Wales (1-2, Kagurazaka, Shinjuku, Tokyo 162-0825)
(Received June 6, 2006; Accepted September 11, 2006)
Abstract
In this study, we designed a new metal-spray coating that has great adhesive strength and which has metal shield parts. It can be used for producing CVD and PVD device parts. Its effectiveness has been verified.
In this field, three methods are typically used, namely plasma powder spraying, flame spraying (also known as rokide rod spraying) and arc spraying. Up until now these three methods have been applied separately.
By combining two of the above-mentioned three thermal spraying methods, we have been able to effectively compensate the defects of using the three spraying methods separately, resulting in much more effective shield parts.
Key words: Thermal, Sprayed, Coating, Shield Parts
